HOME > 제품소개 > Residual Gas Analyzer > XT series


  "All IN ONE"
Quadrupole Mass Anglywer+Ion Gauge
+ Pirani Gauge

 
 



         
 
         
    하나로 통합  
    4중극자 질량분석기+
이온게이지+피라니게이지
= 하나로 통합		  
         
 
         
    Resolution  
    5 X 10-14 torr 검출한계 및 0.5 amu의 고분해능
  
         
 
         
 
         
    Software  
    사용하기 쉬운
윈도우 소프트웨어
(윈도우 NT, 2000, XP)		  
         
 
         
    소형경량화  
    총길이 311mm의 소형경량화
(제어부 포함) 		 
         
 
         
 
         
    Interface  
    안정적이고 빠른
RS232 통신
(115,200 baud) 		 
         
 
         
    Easy install  
    현장에서 사용자가 쉽게
부품교체 		 
         
 
         
Model XT100, XT100M XT200, XT200M XT300, XT300M
Mass range 1 to 100 amu 1 to 200 amu 1 to 300 amu
Mass filter type Quadrupole
Resolution Greater than 0.5 amu @ 10% peak height, adjustable
Operating pressure Atmosphere to UHV ( ion gauge operation below 10-2 torr, RGA operation below 10 -3 torr and Multiplier operation below 10 -6 torr)
Partial Pressure Detector type Faraday cup
Partial Pressure Sensitivity (A/Torr) 5x10-4 into Faraday cup. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy and 2 mA electron emission current.
Minimum detectable partial pressure 5x10-14 torr with Multiplier. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy, and 2 mA electron emission current. 10-11 torr with Faraday cup.
Total Pressure Detector type >10 -3 Torr Pirani type, (measures heat loss from noble metal wire)
Total Pressure Detector type <10 -3 Torr Bayard/Alpert type ion gauge, x-ray limit 10-9
CCU Max. operating temperature 70°C
CCU temperature sensor solid state sensor in CCU, temperature continuously monitored and displayed
Bakeout temperature 300°C (without CCU)
Probe operating temperature 100°C, Platinum RTD on probe, temperature continuously monitored and displayed
Ionizer Design Open ion source , electron impact ionization
Probe Materials SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel
Filament Dual Thoriated Iridium with firmware protection
Degas Built-in 1 to 30 W ramp-up
Electron energy 10 to 150 V, continuously programmable
Ion energy 3 to 10 V, continuously programmable
Electron emission current 0.1 to 5 mA, continuously programmable
Probe mounting Minimum tube I.D. 1.375" flange 2.75" CF
CCU dimensions 3.3" x 4.8"x 7.5". Easily separated from the probe for bakeout
Mass stability ±0.1 amu after 30 minutes warmup
Computer interface RS-232C, 9600 - 115,200 Baud
Software Windows® 2000, XP based application
Power requirement 24 VDC @ 2.1 Amps. Standard 120 VAC adapter supplied
Weight 5 lbs