제품소개

해외 우수한 분석, 측정, 계측기기 제조회사의 독점 대리점 !

home
제품소개home

박막두께측정기

SR SeriesSR100

제품이미지

Spectroscopic Reflectometer

SR100

  • 5 layers 이하의 막 두께 및 반사스펙트럼 측정
  • 2048픽셀 CCD Detector 사용
  • 250 - 1100nm의 파장영역
  • 샘플크기는 200x200mm or 200ø
  • 윈도우 기반의 소프트웨어와 함께 작동하기 용이
제품문의 자료실 동영상 제조사
BEST Good
제품구성
제품구성
SR100
Detector CCD Array with 2048 pixels
Light Source Combined High Power Deuterium and Halogen
Light Delivery Fiber Optics
Stage

Black Anodized Aluminum Alloy with Easy Adjustment for

sample height, 200 mm x 200 mm size
Communication USB with computer
Measurement Type Film thickness, reflection spectrum, refractive index
Software TFProbe 2.x
Computer needed P3 above with minimum 50 MB space
Power 110 - 240 VAC /50-60Hz, 1.5 A
제품사양
제품사양
SR100
Wavelength range 250 to 1100 nm
Spot Size 500 μm to 5mm
Sample Size 200 x 200 mm or 200 mm in diameter
Substrate Size

Up to 50mm thick
Measurable thickness range 2 nm to 50 μm
Measurement Time 2 ms minimum
Accuracy

Better than 0.5% (comparing with ellipsometry results for

Thermal Oxide sample by using the same optical constants)
Repeatability < 1A (1 sigma from 50 thickness readings for 1500 A Thermal SiO2 on Si Wafer)