제품소개
해외 우수한 분석, 측정, 계측기기 제조회사의 독점 대리점 !
박막두께측정기
SE SeriesSE200BA-M300
BEST Good
제품구성
| SE200BA-M300 | |
|---|---|
| Detector | Detector Array with Deep ultra-violet (DUV) range covered |
| Light Source | High Power DUV-Vis-NIR Combined Light Source |
| Incident Angle Change | Automatic with Program setting |
| Stage | Automatic Mapping with Rho-Theta configuration |
| Software | |
| Computer & Monitor | Intel Duo Core Processor, 19" Wide Screen LCD |
| Power | 110 - 240 VAC /50-60Hz, 6 A |
제품사양
| SE200BA-M300 | |
|---|---|
| Wavelength range | 250 to 1100 nm |
| Ellipsometer Wavelength resolution | 1 nm |
| Spot Size | > 1 to 5 mm variable |
| Incident Angle Range | 10 to 90 degree |
| Incident Angle Change Resolution | 0.01 degree |
| Sample Size | Up to 300 mm in diameter |
| Substrate Size | Up to 20 mm thick |
| Measurable thickness range | 0 nm to 30 μm |
| Measurement Time | ~ 1s/Site |
| Accuracy | Better than 0.25% |
| Repeatability | < 1 A (1 sigma from 50 thickness readings for 1500 A Thermal SiO2 on Si Wafer) |
옵션
| SE200BA-M300 |
|---|
|
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| Mapping X-Y Stage (X-Y mode, instead of Rho-Theta mode) |
Heating /Cooling Stage for kenetics study |
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| Combined with Microspectrophotometer (MSP) for patterned sample measurement with digital imaging functions |
적용분야
| SE200BA-M300 |
|---|
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| Forensics, Biological films and materials |
Inks, Mineralogy, Pigments, Toners |
| Optical coatings, TiO2, SiO2, Ta2O5..... |
| Semiconductor compounds |
| Functional films in MEMS/MOEMS |
| Amorphous, nano and crystalline Si |
적용사례
| Table Results for the sample analyzed with Spectroscopic Ellipsometer | |
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| 65 Degree AOI Data Fitting (Blue curves are raw data and red curves are model data) | |
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| 70 Degree AOI Fitting (Blue curves are raw data and red curves are model data) | |
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| 75 Degree AOI Fitting (Blue curves are raw data and red curves are model data) | |
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| Measured Optical Contants for Ta2O5 Film In the Stack | |
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| Measured Optical Contants for Al2O3 Film In the Stack | |
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