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MSP SeriesMSP300

제품이미지

Michrospectrophotometer

MSP300

  • 현미경을 통해 5 layers 막 두께 및 반사스펙트럼 측정
  • 시스템 자동 교정 및 초기화
  • 400 - 1000nm의 파장영역
  • 특수 용도를 충족하기 위해 다양한 옵션
  • 높이와 경사 조절
제품문의 자료실 동영상 제조사
BEST Good
제품구성
제품구성
MSP300
Detector CCD Array with 2048 pixels
Light Source DC regulated Halogen lamp
Stage

Black Anodized Aluminum Alloy with manually

adjustable travel distance 150 mm by 150 mm
Long Working Distance Objectives 10x, 40x or 50x
Communication USB
Measurement Type Reflection/Transmission spectra, Film thickness/refractive index and feature dimensions
Computer & Monitor

Intel Core 2 Duo Processor with 200GB Hard drive and DVD+RW Burner plus 19” LCD Monitor
Power

110 - 240 VAC /50-60Hz, 3 A
제품사양
제품사양
MSP300
Wavelength range 400 to 1000 nm
Wavelength resolution 1nm
Spot Size 100 μm (4x), 40 μm (10x), 8 μm (50x)
Substrate Size
  • Up to 20mm thick
Measurable thickness range

10 nm to 25 μm
Measurement Time 2 ms minimum
Accuracy

Better than 0.5% (comparing with ellipsometry results for

Thermal Oxide sample by using the same optical constants)
Repeatability

< 2 Å (1 sigma from 50 thickness readings for

1500 Å Thermal SiO2 on Si Wafer)
옵션
옵션
MSP300
Wavelength extension to to Further DUV or NIR range
Higher power DUV optics for smaller spot size
Customized configuration for special applications
Heating and Cooling Stage for dynamic study
Optional stage size holding samples up to 300mm
Higher wavelength range resolution down to 0.1nm
Various filters for special applications
Add-on accessories for fluorescence measurement
Add-on accessories for polarizing applications
적용분야
적용분야
MSP300
  • Semiconductor fabrication (PR, Oxide, Nitride..)
  • Liquid crystal display (ITO, PR, Cell gap…..)
Forensics, Biological films and materials

Inks, Mineralogy, Pigments, Toners
Optical coatings, TiO2, SiO2, Ta2O5.....
Semiconductor compounds
Functional films in MEMS/MOEMS
Amorphous, nano and crystalline Si
적용사례
적용사례
Measured Transmission Spectra for Color Pixels with Microspectrophotometer MSP300
Measured Film Thickness of TiO2 on Silicon with Microspectrophotometer MSP300
Measured Reflection Spectra over a MEMS Device Inside/Outside a Via-hole with Microspectrophotometer MSP300
Digital Imaging Function in MSP300 System with Microspectrophotometer MSP300