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MSP SeriesMSP500

제품이미지

Michrospectrophotometer

MSP500

  • 현미경을 통해 5 layers 막 두께 및 반사스펙트럼 측정
  • 시스템 자동 교정 및 초기화
  • 250 - 1700nm의 파장영역
  • 특수 용도를 충족하기 위해 다양한 옵션
  • 높이와 경사 조절
제품문의 자료실 동영상 제조사
BEST Good
제품구성
제품구성
MSP500
Detector CCD Array with 2048 pixels for UV-Vis and InGaAs Arrary for NIR
Light Source High Power DUV and Visible
Stage Black Anodized Aluminum Alloy with motorized travel distance 100 mm by 75 mm
Long Working Distance Objectives 10x, 15x, 50x (one DUV objective included)
Communication USB
Measurement Type Reflection/Transmission spectra, Film thickness/refractive index and feature dimensions
Computer & Monitor

Intel Core 2 Duo Processor with 200GB Hard drive and DVD+RW Burner plus 19” LCD Monitor
Power

110 - 240 VAC /50-60Hz, 3 A
제품사양
제품사양
MSP500
Wavelength range 250 to 1700 nm
Wavelength resolution 1 nm for UV-Vis and 5 nm for NIR
Spot Size 100 μm (4x), 40 μm (10x), 30 μm (15x), 8 μm (50x)
Substrate Size
  • Up to 20 mm thick
Measurable thickness range

2 nm to 50 μm
Measurement Time 2 ms minimum
Accuracy

Better than 0.5% (comparing with ellipsometry results for

Thermal Oxide sample by using the same optical constants)
Repeatability

< 2 Å (1 sigma from 50 thickness readings for

1500 Å Thermal SiO2 on Si Wafer)
옵션
옵션
MSP500
Wavelength extension to Further DUV or longer NIR range (~2500nm)
Higher power DUV optics for smaller spot size
Customized configuration for special applications
Heating and Cooling Stage for dynamic study
Optional stage size holding samples up to 300mm
Higher wavelength range resolution down to 0.1nm
Various filters for special applications
Add-on accessories for fluorescence measurement
Add-on accessories for polarizing applications
  • Add-on accessories for Raman applications
  • Automatic Mapping Stage up to 300mm wafer
적용분야
적용분야
MSP500
  • Semiconductor fabrication (PR, Oxide, Nitride..)
  • Liquid crystal display (ITO, PR, Cell gap.....)
Forensics, Biological films and materials

Inks, Mineralogy, Pigments, Toners
Optical coatings, TiO2, SiO2, Ta2O5.....
Semiconductor compounds
Functional films in MEMS/MOEMS
Amorphous, nano and crystalline Si

Pharmaceuticals, Medial Devices
적용사례
적용사례
Measured Transmission Spectra for Color Pixels
Measured Film Thickness of TiO2 on Silicon
Measured Reflection Spectra over a MEMS Device Inside/Outside a Via-hole
4. Digital Imaging Function in MSP500 System